JPH0548085Y2 - - Google Patents
Info
- Publication number
- JPH0548085Y2 JPH0548085Y2 JP12094988U JP12094988U JPH0548085Y2 JP H0548085 Y2 JPH0548085 Y2 JP H0548085Y2 JP 12094988 U JP12094988 U JP 12094988U JP 12094988 U JP12094988 U JP 12094988U JP H0548085 Y2 JPH0548085 Y2 JP H0548085Y2
- Authority
- JP
- Japan
- Prior art keywords
- imaging
- diffraction image
- imaging device
- control
- axis moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003384 imaging method Methods 0.000 claims description 40
- 238000001514 detection method Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12094988U JPH0548085Y2 (en]) | 1988-09-14 | 1988-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12094988U JPH0548085Y2 (en]) | 1988-09-14 | 1988-09-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0243606U JPH0243606U (en]) | 1990-03-26 |
| JPH0548085Y2 true JPH0548085Y2 (en]) | 1993-12-20 |
Family
ID=31367518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12094988U Expired - Lifetime JPH0548085Y2 (en]) | 1988-09-14 | 1988-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0548085Y2 (en]) |
-
1988
- 1988-09-14 JP JP12094988U patent/JPH0548085Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0243606U (en]) | 1990-03-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4615621A (en) | Auto-focus alignment and measurement system and method | |
| JP2013108992A (ja) | ３次元形状測定装置 | |
| JPS63238761A (ja) | ラスタ入力走査装置の校正装置及び方法 | |
| US4580900A (en) | Auto focus alignment and measurement system and method | |
| JPH0593888A (ja) | オフ・セツト鏡の光軸を決めるための方法および装置 | |
| JPH0122977B2 (en]) | ||
| JPS60145764A (ja) | 画像走査記録方法 | |
| JPH0548085Y2 (en]) | ||
| JP2000121902A (ja) | レンズ系光軸調整方法およびレンズ系光軸調整装置 | |
| JPH08327332A (ja) | クリームはんだ膜厚測定装置 | |
| JP2828145B2 (ja) | 光切断顕微鏡装置及びその光学手段の位置合わせ方法 | |
| JPS623280A (ja) | 回折格子露光装置 | |
| JPH02218110A (ja) | 光学結像装置及び方法 | |
| CN217930168U (zh) | 复合式的影像仪 | |
| JP3341779B2 (ja) | 干渉計におけるアライメント装置 | |
| JPH05172524A (ja) | 光学式計測装置 | |
| JPH0232359Y2 (en]) | ||
| JP2605644B2 (ja) | 露光装置および露光方法 | |
| JPH0635162Y2 (ja) | レンズ検査装置 | |
| JPS615317A (ja) | 自動焦点合わせ装置 | |
| JP3213642B2 (ja) | レンズ性能評価方法および装置 | |
| JPH0228846B2 (en]) | ||
| JPH06151278A (ja) | 焦点位置検出方法及び焦点位置合わせ方法 | |
| JPS62169353U (en]) | ||
| JPH01164031A (ja) | アライメント装置 |